Issued Patents All Time
Showing 1–6 of 6 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 9694572 | Bonding device and bonding system | Shintaro Sugihara, Goro Furutani, Yasunobu Iwamoto | 2017-07-04 |
| 9263268 | Joining device, joining system and joining method | Masahiro Yamamoto, Shintaro Sugihara | 2016-02-16 |
| 9263312 | Joining device and joining position adjustment method using joining device | Michikazu Nakamura, Masahiko Sugiyama, Naoki Akiyama, Yosuke Omori | 2016-02-16 |
| 8210417 | Bonding apparatus | Naoki Akiyama, Masahiko Sugiyama | 2012-07-03 |
| 7827931 | Plasma processor electrode and plasma processor | Keiichi Matsushima, Takashi Suzuki | 2010-11-09 |
| 7231321 | Method of resetting substrate processing apparatus, storage medium storing program for implementing the method, and substrate processing apparatus | Hideki Tanaka, Tomoya Okubo, Ryoko Kobayashi | 2007-06-12 |