Issued Patents All Time
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 7231321 | Method of resetting substrate processing apparatus, storage medium storing program for implementing the method, and substrate processing apparatus | Hajime Furuya, Hideki Tanaka, Tomoya Okubo | 2007-06-12 |
| 6422227 | Dicing apparatus, kerf inspecting method and kerf inspecting system | Hiroyuki Yasutomi | 2002-07-23 |