Issued Patents All Time
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 9466468 | Shower head, plasma processing apparatus and plasma processing method | Nobuyuki Okayama, Koichi Kazama, Shuichiro Uda, Satoshi Yamada | 2016-10-11 |
| 9048191 | Plasma etching method | Shuichiro Uda, Takaaki Nezu, Koji Maruyama | 2015-06-02 |