Issued Patents All Time
Showing 1–12 of 12 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11328910 | Substrate processing apparatus | — | 2022-05-10 |
| 10224226 | Substrate processing apparatus | — | 2019-03-05 |
| 9799542 | Substrate processing apparatus | — | 2017-10-24 |
| 8894355 | Turbomolecular pump, and particle trap for turbomolecular pump | Yukiteru Sekita, Kazuma Kubota, Tsuyoshi Moriya | 2014-11-25 |
| 8727708 | Reflecting device, communicating pipe, exhausting pump, exhaust system, method for cleaning the system, storage medium storing program for implementing the method, substrate processing apparatus, and particle capturing component | Tsuyoshi Moriya, Takahiro Murakami, Yoshiyuki Kobayashi, Tetsuji Sato, Shosuke Endoh +1 more | 2014-05-20 |
| 8356970 | Exhaust pump, communicating pipe, and exhaust system | Tsuyoshi Moriya | 2013-01-22 |
| 8062432 | Cleaning method for turbo molecular pump | Tsuyoshi Moriya | 2011-11-22 |
| 7927066 | Reflecting device, communicating pipe, exhausting pump, exhaust system, method for cleaning the system, storage medium storing program for implementing the method, substrate processing apparatus, and particle capturing component | Tsuyoshi Moriya, Takahiro Murakami, Yoshiyuki Kobayashi, Tetsuji Sato, Shosuke Endoh +1 more | 2011-04-19 |
| 6211293 | Polycarbodiimide compound, production process thereof, resin composition, and treatment method of article | Michiei Nakamura, Hiroyuki Shimanaka, Yoshitaka Wakebe, Tatsuo Kawamura, Ken Okura +2 more | 2001-04-03 |
| 5929188 | Polycarbodiimide compound, production process thereof, resin composition, and treatment method of article | Michiei Nakamura, Hiroyuki Shimanaka, Yoshitaka Wakebe, Tatsuo Kawamura, Ken Okura +2 more | 1999-07-27 |
| 5489643 | Coating compositions | Setsuo Hirose, Yoshinori Konno, Masatoshi Nakajima, Toshiaki Higuchi | 1996-02-06 |
| 4240943 | Textile finishing composition | Takao Endoh, Satoshi Shioume, Tomio Kuroki, Kazuhiro Teramae | 1980-12-23 |