Issued Patents All Time
Showing 1–8 of 8 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10510513 | Plasma processing device and high-frequency generator | Kazushi Kaneko, Hideo Kato | 2019-12-17 |
| 10109463 | Microwave automatic matcher and plasma processing apparatus | Kazushi Kaneko, Hideo Kato, Yuji Otsuka, Shinji Kawada | 2018-10-23 |
| 10074524 | Plasma processing apparatus and high frequency generator | Kazushi Kaneko, Hideo Kato | 2018-09-11 |
| 9977070 | Method for inspecting magnetron | Kazushi Kaneko, Hideo Kato, Eiji Takahashi | 2018-05-22 |
| 9418822 | Plasma processing apparatus, plasma processing method and high frequency generator | Kazushi Kaneko, Naoki Matsumoto, Koji Koyama, Hideo Kato, Kiyotaka Ishibashi | 2016-08-16 |
| 9373483 | Plasma processing apparatus and high frequency generator | Kazushi Kaneko, Hideo Kato | 2016-06-21 |
| 9355918 | Method for producing high-purity polycrystalline silicon | Kazuomi Sato, Shuichi Miyao | 2016-05-31 |
| 9159536 | Plasma processing apparatus, abnormal oscillation determination method and high-frequency generator | Kazushi Kaneko, Yunosuke Hashimoto | 2015-10-13 |