Issued Patents All Time
Showing 1–3 of 3 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10662531 | Plasma processing apparatus, abnormality determination method, and microwave generator | Kazushi Kaneko, Yohei Ishida | 2020-05-26 |
| 9241397 | Microwave plasma processing apparatus and microwave supply method | Kazushi Kaneko, Yohei Ishida | 2016-01-19 |
| 9159536 | Plasma processing apparatus, abnormal oscillation determination method and high-frequency generator | Kazushi Kaneko, Kazunori Funazaki | 2015-10-13 |