Issued Patents All Time
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10665430 | Gas supply system, substrate processing system and gas supply method | Atsushi Sawachi, Norihiko Amikura, Kouji Nishino, Yohei Sawada | 2020-05-26 |
| 8069704 | Sealing structure of plasma processing apparatus, sealing method, and plasma processing apparatus including the sealing structure | Kiyotaka Ishibashi | 2011-12-06 |