Issued Patents All Time
Showing 1–19 of 19 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 12176224 | Substrate processing apparatus and substrate processing method | Yoshifumi Amano | 2024-12-24 |
| 12142496 | Substrate processing apparatus and substrate processing method | Yoshifumi Amano | 2024-11-12 |
| 11776824 | Processing liquid ejection nozzle, nozzle arm, substrate processing apparatus, and substrate processing method | Yoshifumi Amano, Tatsuhiro Ueki | 2023-10-03 |
| D934991 | Component of a liquid discharge nozzle for semiconductor substrate processing apparatus | Yoshifumi Amano | 2021-11-02 |
| D930796 | Liquid discharge nozzle for semiconductor substrate processing apparatus | Yoshifumi Amano | 2021-09-14 |
| D929534 | Liquid discharge nozzle for semiconductor substrate processing apparatus | Yoshifumi Amano | 2021-08-31 |
| 11024518 | Substrate processing apparatus, substrate processing method and recording medium | Norihiro Ito, Jiro Higashijima, Nobuhiro Ogata, Takahisa Otsuka, Yuichi Douki +2 more | 2021-06-01 |
| 10580669 | Substrate processing apparatus and nozzle | Tsuyoshi Fukushima, Norihiro Ito | 2020-03-03 |
| 10486208 | Substrate processing apparatus, method of cleaning substrate processing apparatus, and storage medium | Nobuhiro Ogata, Norihiro Ito, Jiro Higashijima, Yusuke Hashimoto | 2019-11-26 |
| 9768010 | Liquid treatment apparatus | Norihiro Ito, Naoki Shindo, Yosuke Hachiya | 2017-09-19 |
| 9768039 | Substrate processing apparatus | Norihiro Ito, Hidetoshi Nakao, Kazuyoshi Shinohara, Satoru Tanaka, Yuki Yoshida +1 more | 2017-09-19 |
| 9691602 | Liquid process apparatus and liquid process method | Norihiro Ito, Naoki Shindo, Yosuke Hachiya, Takashi Nagai | 2017-06-27 |
| 9640383 | Liquid treatment apparatus and liquid treatment method | Norihiro Ito, Takashi Nagai | 2017-05-02 |
| 9245737 | Liquid treatment apparatus and liquid treatment method | Norihiro Itoh | 2016-01-26 |
| 9190311 | Liquid arm cleaning unit for substrate processing apparatus | Jiro Higashijima, Yosuke Hachiya, Norihiro Itoh, Naoki Shindo, Yuki Ito | 2015-11-17 |
| 9177838 | Liquid process apparatus and liquid process method | Norihiro Ito, Naoki Shindo, Yosuke Hachiya, Takashi Nagai | 2015-11-03 |
| 9105671 | Liquid processing apparatus and liquid processing method | Norihiro Itoh | 2015-08-11 |
| 9064908 | Substrate liquid processing apparatus, liquid processing method, and storage medium | Norihiro Itoh | 2015-06-23 |
| 8865483 | Substrate processing apparatus and substrate processing method | Norihiro Itoh, Yusuke Hashimoto, Takashi Nagai | 2014-10-21 |