Issued Patents All Time
Showing 1–4 of 4 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11776824 | Processing liquid ejection nozzle, nozzle arm, substrate processing apparatus, and substrate processing method | Yoshifumi Amano, Kazuhiro Aiura | 2023-10-03 |
| 11640911 | Substrate processing method of controlling discharge angle and discharge position of processing liquid supplied to peripheral portion of substrate | Jian Zhang | 2023-05-02 |
| 11244838 | Substrate processing apparatus and substrate processing method of controlling discharge angle and discharge position of processing liquid supplied to peripheral portion of substrate | Jian Zhang | 2022-02-08 |
| 10403518 | Substrate processing method, substrate processing apparatus and recording medium | Hiromitsu Nanba | 2019-09-03 |