Issued Patents All Time
Showing 1–17 of 17 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10490424 | Substrate processing apparatus, substrate processing method, and storage medium | — | 2019-11-26 |
| 10431448 | Wet etching method, substrate liquid processing apparatus, and storage medium | — | 2019-10-01 |
| 10403518 | Substrate processing method, substrate processing apparatus and recording medium | Tatsuhiro Ueki | 2019-09-03 |
| 8479753 | Liquid processing apparatus and method | Norihiro Ito | 2013-07-09 |
| 8444772 | Liquid processing apparatus | Norihiro Itoh | 2013-05-21 |
| 8152933 | Substrate processing apparatus, substrate processing method, and drain cup cleaning method | Norihiro Ito | 2012-04-10 |
| 8113221 | Substrate cleaning method, substrate cleaning apparatus and computer readable recording medium | Takashi Yabuta, Takehiko Orii | 2012-02-14 |
| 8051862 | Liquid processing apparatus and liquid processing method | Norihiro Ito, Satoshi Kaneko | 2011-11-08 |
| 8043440 | Cleaning apparatus and method and computer readable medium | Norihiro Ito | 2011-10-25 |
| 8043467 | Liquid processing apparatus and liquid processing method | Masahiro Yoshida, Yuji Murakami, Hiroshi Nagayasu | 2011-10-25 |
| 7998308 | Liquid processing apparatus | Satoshi Kaneko, Kazuhisa Matsumoto, Norihiro Ito, Masami Akimoto, Takayuki Toshima | 2011-08-16 |
| 7927429 | Substrate cleaning method, substrate cleaning apparatus and computer readable recording medium | Takashi Yabuta, Takehiko Orii | 2011-04-19 |
| 7793610 | Liquid processing apparatus | Masami Akimoto, Takayuki Toshima, Satoshi Kaneko, Kazuhisa Matsumoto, Norihiro Ito | 2010-09-14 |
| 7749333 | Substrate processing apparatus and method | — | 2010-07-06 |
| 7699939 | Substrate cleaning method | — | 2010-04-20 |
| 7354484 | Liquid processing apparatus and liquid processing method | Takehiko Orii, Masahiro Mukoyama | 2008-04-08 |
| 7275553 | Liquid processing apparatus and liquid processing method | Takehiko Orii, Masahiro Mukoyama | 2007-10-02 |