Issued Patents All Time
Showing 1–7 of 7 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11935766 | Liquid processing apparatus and liquid processing method | — | 2024-03-19 |
| 10381233 | Method and apparatus for substrate processing | Koji Kagawa, Syuhei Yonezawa, Kazuya Dobashi, Toshihide Takashima | 2019-08-13 |
| 7803230 | Substrate cleaning apparatus, substrate cleaning method, and medium for recording program used for the method | Kenji Sekiguchi, Takehiko Orii, Hiroki Ohno, Satoru Tanaka, Takuya Mori | 2010-09-28 |
| 7472713 | Substrate processing apparatus | Masahiro Mukoyama, Takayuki Toshima | 2009-01-06 |
| 7416632 | Substrate processing apparatus and substrate processing method | Takehiko Orii | 2008-08-26 |
| 7329616 | Substrate processing apparatus and substrate processing method | Takehiko Orii | 2008-02-12 |
| 7063094 | Substrate processing apparatus | Masahiro Mukoyama, Takayuki Toshima | 2006-06-20 |