NK

Norihisa Koga

TL Tokyo Electron Limited: 33 patents #109 of 5,567Top 2%
Overall (All Time): #107,154 of 4,157,543Top 3%
33
Patents All Time

Issued Patents All Time

Showing 26–33 of 33 patents

Patent #TitleCo-InventorsDate
6811613 Coating film forming apparatus Takahiro Kitano, Toshichika Takei, Yoshiyuki Kawafuchi 2004-11-02
6761125 Coating film forming system Takahiro Kitano, Yoshiyuki Kawafuchi, Toshichika Takei 2004-07-13
6716478 Coating film forming apparatus and coating film forming method Takahiro Kitano, Masateru Morikawa, Yukihiko Esaki, Nobukazu Ishizaka, Kazuhiro Takeshita +2 more 2004-04-06
6676757 Coating film forming apparatus and coating unit Takahiro Kitano, Masateru Morikawa, Yukihiko Esaki, Nobukazu Ishizaka, Kazuhiro Takeshita +2 more 2004-01-13
6616760 Film forming unit Takahiro Kitano, Masateru Morikawa, Yukihiko Esaki, Nobukazu Ishizaka, Kazuhiro Takeshita +2 more 2003-09-09
6605153 Coating film forming apparatus Takahiro Kitano, Masateru Morikawa, Yukihiko Esaki, Nobukazu Ishizaka, Kazuhiro Takeshita +2 more 2003-08-12
6514344 Film forming unit Takahiro Kitano, Masateru Morikawa, Yukihiko Esaki, Nobukazu Ishizaka, Kazuhiro Takeshita +2 more 2003-02-04
6383948 Coating film forming apparatus and coating film forming method Takahiro Kitano, Masateru Morikawa, Yukihiko Esaki, Nobukazu Ishizaka, Kazuhiro Takeshita +2 more 2002-05-07