Issued Patents All Time
Showing 26–46 of 46 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 7470098 | Detecting apparatus and detecting method | — | 2008-12-30 |
| 7208066 | Substrate processing apparatus and substrate processing method | Junichi Kitano, Yuji Matsuyama, Takahiro Kitano, Takayuki Katano, Hidefumi Matsui +7 more | 2007-04-24 |
| 6915183 | Substrate processing apparatus and method of aligning substrate carrier apparatus | Kazuhiko Ito, Michio Kinoshita | 2005-07-05 |
| 6709545 | Substrate processing apparatus and substrate processing method | — | 2004-03-23 |
| 6672779 | Substrate processing apparatus and substrate processing method | Issei Ueda, Shinichi Hayashi, Yuji Matsuyama, Yoichi Deguchi | 2004-01-06 |
| 6643564 | Method of determining retreat permission position of carrier arm and teaching device thereof | Yukinori Kataoka, Seiji Kozawa | 2003-11-04 |
| 6471422 | Substrate processing apparatus and substrate processing method | Issei Ueda, Shinichi Hayashi, Yuji Matsuyama, Yoichi Deguchi | 2002-10-29 |
| 6402401 | Substrate processing apparatus and substrate processing method | Issei Ueda, Shinichi Hayashi, Yuji Matsuyama, Yoichi Deguchi | 2002-06-11 |
| 6332751 | Transfer device centering method and substrate processing apparatus | Seiji Kozawa, Jun Ookura | 2001-12-25 |
| RE37470 | Substrate processing apparatus and substrate processing method | Jun Ohkura, Hiroyuki Kudou, Masanori Tateyama, Yasuhiro Sakamoto | 2001-12-18 |
| 6206974 | Substrate processing system, interface apparatus, and substrate transportation method | Yukio Shigaki | 2001-03-27 |
| 6168669 | Substrate holding apparatus and substrate process system | Kenji Yasuda | 2001-01-02 |
| 6054181 | Method of substrate processing to form a film on multiple target objects | Mitsuhiro Nanbu, Hideaki Gotou, Masanori Tateyama, Yuji Yoshimoto, Tomoko Ishimoto +6 more | 2000-04-25 |
| 6050389 | Carrier apparatus with more than one carrier belts and processing apparatus therewith | Seiji Kozawa | 2000-04-18 |
| 5928390 | Vertical processing apparatus | Hidetami Yaegashi, Takayuki Toshima, Masami Akimoto, Eiji Yamaguchi, Junichi Kitano +2 more | 1999-07-27 |
| 5826129 | Substrate processing system | Keizo Hasebe, Shinji Nagashima, Norio Semba, Masami Akimoto, Yoshio Kimura +3 more | 1998-10-20 |
| 5725664 | Semiconductor wafer processing apparatus including localized humidification between coating and heat treatment sections | Mitsuhiro Nanbu, Hideaki Gotou, Masanori Tateyama, Yuji Yoshimoto, Tomoko Ishimoto +6 more | 1998-03-10 |
| 5664254 | Substrate processing apparatus and substrate processing method | Jun Ohkura, Hiroyuki Kudou, Masanori Tateyama, Yasuhiro Sakamoto | 1997-09-02 |
| 5565034 | Apparatus for processing substrates having a film formed on a surface of the substrate | Mitsuhiro Nanbu, Hideaki Gotou, Masanori Tateyama, Yuji Yoshimoto, Tomoko Ishimoto +6 more | 1996-10-15 |
| 5460478 | Method for processing wafer-shaped substrates | Masami Akimoto, Kazutoshi Yoshioka | 1995-10-24 |
| 5364222 | Apparatus for processing wafer-shaped substrates | Masami Akimoto, Kazutoshi Yoshioka | 1994-11-15 |