YS

Yukio Shigaki

TL Tokyo Electron Limited: 1 patents #3,538 of 5,567Top 65%
Overall (All Time): #3,576,499 of 4,157,543Top 90%
1
Patents All Time

Issued Patents All Time

Showing 1–1 of 1 patents

Patent #TitleCo-InventorsDate
6206974 Substrate processing system, interface apparatus, and substrate transportation method Naruaki Iida 2001-03-27