Issued Patents All Time
Showing 1–5 of 5 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 8812266 | Abnormality determination system and abnormality determination method for processing apparatus | Naoto Nakamura, Toshihiko Nagano, Ryuji Asai | 2014-08-19 |
| 6814809 | Coating and developing apparatus and pattern forming method | Michiaki Matsushita, Masataka Matsunaga | 2004-11-09 |
| 6643564 | Method of determining retreat permission position of carrier arm and teaching device thereof | Yukinori Kataoka, Naruaki Iida | 2003-11-04 |
| 6332751 | Transfer device centering method and substrate processing apparatus | Naruaki Iida, Jun Ookura | 2001-12-25 |
| 6050389 | Carrier apparatus with more than one carrier belts and processing apparatus therewith | Naruaki Iida | 2000-04-18 |