Issued Patents All Time
Showing 1–8 of 8 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 8343280 | Multi-zone substrate temperature control system and method of operating | — | 2013-01-01 |
| 6589435 | Plasma etching method | Shin Okamoto | 2003-07-08 |
| 6110287 | Plasma processing method and plasma processing apparatus | Izumi Arai, Yoshifumi Tahara, Hiroshi Nishikawa, Yoshinobu MITANO, Kazuo Fukasawa +2 more | 2000-08-29 |
| 5766498 | Anisotropic etching method and apparatus | Masayuki Kojima, Yoshikazu Ito, Kazushi Tomita, Shigeki Tozawa, Masashi Arasawa +1 more | 1998-06-16 |
| 5593540 | Plasma etching system and plasma etching method | Kazushi Tomita, Yoshikazu Ito, Motohiro Hirano, Akira Nozawa, Hiromitsu Matsuo +2 more | 1997-01-14 |
| 5445709 | Anisotropic etching method and apparatus | Masayuki Kojima, Yoshikazu Ito, Kazuhsi Tomita, Shigeki Tozawa, Masashi Arasawa +1 more | 1995-08-29 |
| 5423936 | Plasma etching system | Kazushi Tomita, Yoshikazu Ito, Motohiro Hirano, Akira Nozawa, Hiromitsu Matsuo +2 more | 1995-06-13 |
| 4812201 | Method of ashing layers, and apparatus for ashing layers | Hiroyuki Sakai, Kazutoshi Yoshioka, Kimiharu Matsumura, Keisuke Shigaki, Yutaka Amemiya +2 more | 1989-03-14 |