Issued Patents All Time
Showing 1–5 of 5 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| RE36810 | Plasma processing apparatus and method | Katsuhiko Ono, Hiroshi Nishikawa, Kazuo Tsuchiya | 2000-08-08 |
| 5766498 | Anisotropic etching method and apparatus | Masayuki Kojima, Yoshikazu Ito, Kazushi Tomita, Shigeki Tozawa, Shunichi Iimuro +1 more | 1998-06-16 |
| 5622593 | Plasma processing apparatus and method | Katsuhiko Ono, Hiroshi Nishikawa, Kazuo Tsuchiya | 1997-04-22 |
| 5547539 | Plasma processing apparatus and method | Katsuhiko Ono, Hiroshi Nishikawa, Kazuo Tsuchiya | 1996-08-20 |
| 5445709 | Anisotropic etching method and apparatus | Masayuki Kojima, Yoshikazu Ito, Kazuhsi Tomita, Shigeki Tozawa, Shunichi Iimuro +1 more | 1995-08-29 |