Issued Patents All Time
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 5593540 | Plasma etching system and plasma etching method | Kazushi Tomita, Yoshikazu Ito, Motohiro Hirano, Akira Nozawa, Shunichi Iimuro +2 more | 1997-01-14 |
| 5423936 | Plasma etching system | Kazushi Tomita, Yoshikazu Ito, Motohiro Hirano, Akira Nozawa, Shunichi Iimuro +2 more | 1995-06-13 |