Issued Patents All Time
Showing 1–3 of 3 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11201068 | Heat treatment apparatus, method of managing heat treatment apparatus and storage medium | Junnosuke Maki | 2021-12-14 |
| 11142823 | Substrate processing apparatus, substrate processing method, and storage medium | — | 2021-10-12 |
| 10049905 | Substrate heat treatment apparatus, substrate heat treatment method, storage medium and heat-treatment-condition detecting apparatus | Koudai Higashi | 2018-08-14 |