Issued Patents All Time
Showing 1–10 of 10 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 12431374 | Information acquisition system and information acquisition method | Junnosuke Maki, Ryo Konishi | 2025-09-30 |
| 11906414 | Foreign substance detection device and foreign substance detection method | Masato Hayashi, Kohei Noguchi, Daisuke Kajiwara | 2024-02-20 |
| 11879839 | Substrate processing apparatus and substrate processing method | Masato Hayashi, Kohei Noguchi | 2024-01-23 |
| 11402313 | Foreign substance detection device and foreign substance detection method | Masato Hayashi, Kohei Noguchi, Daisuke Kajiwara | 2022-08-02 |
| 11340152 | Substrate processing apparatus, substrate processing system, and substrate processing method | Masato Hayashi, Kohei Noguchi, Makoto Ogata | 2022-05-24 |
| 11048016 | Foreign substance detection device, foreign substance detection method and recording medium | Masato Hayashi, Kohei Noguchi, Daisuke Kajiwara | 2021-06-29 |
| 11002656 | Substrate processing apparatus, substrate processing system, and substrate processing method | Masato Hayashi, Kohei Noguchi, Makoto Ogata | 2021-05-11 |
| 10049905 | Substrate heat treatment apparatus, substrate heat treatment method, storage medium and heat-treatment-condition detecting apparatus | Shinichiro Misaka | 2018-08-14 |
| 9953853 | Substrate transport apparatus | Masato Hayashi | 2018-04-24 |
| 8608378 | Temperature measuring apparatus | Hisaki Ishida, Masato Hayashi | 2013-12-17 |