Issued Patents All Time
Showing 26–40 of 40 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 8888387 | Coating and developing apparatus and method | Nobuaki Matsuoka, Akira Miyata, Shinichi Hayashi | 2014-11-18 |
| 8817225 | Coating and developing apparatus and method, and storage medium | Nobuaki Matsuoka, Akira Miyata, Shinichi Hayashi | 2014-08-26 |
| 8755935 | Substrate holder positioning method and substrate processing system | Yuichi Douki, Tokutarou Hayashi, Naruaki Iida | 2014-06-17 |
| 8740481 | Coating and developing apparatus | Nobuaki Matsuoka, Akira Miyata, Shinichi Hayashi | 2014-06-03 |
| 8720873 | Substrate holding device | Shinichi Hayashi, Naruaki Iida, Hideki Kajiwara | 2014-05-13 |
| 8707805 | Transfer apparatus and transfer method | Junnosuke Maki, Mitsuteru Yano, Seiji Nakano, Tsuyoshi Watanabe, Yasunori Toyoda +2 more | 2014-04-29 |
| 8534936 | Coating and developing apparatus | Nobuaki Matsuoka, Akira Miyata, Shinichi Hayashi | 2013-09-17 |
| 8528889 | Device and method for supporting a substrate | Seiji Nakano, Michiaki Matsushita, Naruaki Iida, Katsuhiro Morikawa | 2013-09-10 |
| 8506186 | Coating and developing apparatus, coating and developing method and non-transitory tangible medium | Shinichi Hayashi, Yuichi Douki, Akira Miyata, Yuuichi Yamamoto, Kousuke Yoshihara +1 more | 2013-08-13 |
| 8480319 | Coating and developing apparatus, coating and developing method and non-transitory tangible medium | Shinichi Hayashi, Yuichi Douki, Akira Miyata, Yuuichi Yamamoto, Kousuke Yoshihara +1 more | 2013-07-09 |
| 8441618 | Substrate transfer method and apparatus | Masahiro Nakaharada, Naruaki Iida, Katsuhiro Morikawa | 2013-05-14 |
| 8419299 | Coating and developing apparatus and method, and storage medium | Nobuaki Matsuoka, Akira Miyata, Shinichi Hayashi | 2013-04-16 |
| 8277163 | Substrate transfer apparatus, substrate process system, and substrate transfer method | Akira Murata, Yuichi Douki | 2012-10-02 |
| 7836845 | Substrate carrying and processing apparatus | Mitsuhiro Tanoue | 2010-11-23 |
| 7287920 | Semiconductor manufacturing apparatus and method | Shinichi Hayashi, Tsunenaga Nakashima, Masami Akimoto, Nobuaki Matsuoka | 2007-10-30 |