Issued Patents All Time
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10037901 | Substrate liquid treatment apparatus, method of cleaning substrate liquid treatment apparatus and non-transitory storage medium | Kazuya Koyama, Hiromi Kiyose, Shuhei Takahashi, Hideki Nishimura, Takashi Uno +1 more | 2018-07-31 |
| 9321085 | Substrate processing method, storage medium storing computer program for implementing substrate processing method and substrate processing apparatus | Teruomi Minami, Satoru Tanaka, Tatsuya Nagamatsu, Hiroyuki Suzuki, Yosuke Kawabuchi +1 more | 2016-04-26 |