Issued Patents All Time
Showing 26–50 of 75 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 8372212 | Supercritical drying method and apparatus for semiconductor substrates | Yohei Sato, Hisashi Okuchi, Hiroshi Tomita, Hidekazu Hayashi, Yukiko Kitajima +5 more | 2013-02-12 |
| 8303724 | Substrate processing method and non-transitory storage medium for carrying out such method | Koukichi Hiroshiro, Yuji Kamikawa, Naoki Shindo | 2012-11-06 |
| 8235061 | Substrate processing apparatus and substrate processing method | Kazuo Terada, Kazuyuki Honda | 2012-08-07 |
| 8206785 | Cap metal forming method | Mitsuaki Iwashita, Takashi Tanaka, Yusuke Saito | 2012-06-26 |
| 8015984 | Substrate processing apparatus including a drying mechanism using a fluid mixture of purified water and a volatile organic solvent | Koukichi Hiroshiro, Yuji Kamikawa, Naoki Shindo | 2011-09-13 |
| 8003509 | Semiconductor manufacturing apparatus and semiconductor manufacturing method | Kenichi Hara, Mitsuaki Iwashita, Takashi Tanaka, Takehiko Orii | 2011-08-23 |
| 7998306 | Substrate processing apparatus | Koukichi Hiroshiro, Hideyuki Yamamoto, Kazuhiro Takeshita | 2011-08-16 |
| 7998308 | Liquid processing apparatus | Satoshi Kaneko, Kazuhisa Matsumoto, Norihiro Ito, Masami Akimoto, Hiromitsu Nanba | 2011-08-16 |
| 7849864 | Liquid processing system | Kazuhisa Matsumoto, Satoshi Kaneko, Masami Akimoto, Norihiro Ito | 2010-12-14 |
| 7836900 | Substrate processing system, substrate processing method, recording medium and software | Naoki Shindo, Hiroshi Yano, Kotaro Tsurusaki | 2010-11-23 |
| 7793610 | Liquid processing apparatus | Masami Akimoto, Satoshi Kaneko, Kazuhisa Matsumoto, Norihiro Ito, Hiromitsu Nanba | 2010-09-14 |
| 7731799 | Substrate processing method, substrate processing apparatus and computer-readable memory medium | Tadashi Iino, Yusuke Saito, Mitsunori Nakamori, Noritaka Uchida, Takehiko Orii | 2010-06-08 |
| 7482281 | Substrate processing method | Yasushi Fujii, Takehiko Orii | 2009-01-27 |
| 7472713 | Substrate processing apparatus | Masaru Amai, Masahiro Mukoyama | 2009-01-06 |
| 7410543 | Substrate processing method | Naoki Shindo, Tadashi Iino | 2008-08-12 |
| 7387131 | Processing apparatus and substrate processing method | Osamu Kuroda, Hiroki Taniyama | 2008-06-17 |
| 7300598 | Substrate processing method and apparatus | Nobuo Konishi, Takehiko Orii | 2007-11-27 |
| 7229522 | Substrate processing apparatus and substrate processing method | Hitoshi Abe | 2007-06-12 |
| 7191785 | Substrate processing apparatus for resist film removal | Kinya Ueno, Miyako Yamasaka, Hideyuki Tsutsumi, Tadashi Iino, Yuji Kamikawa | 2007-03-20 |
| 7063094 | Substrate processing apparatus | Masaru Amai, Masahiro Mukoyama | 2006-06-20 |
| 6895979 | Processing apparatus and processing method | Kyouji Kohama, Eiji Shimbo, Yuji Kamikawa, Hiroki Ohno | 2005-05-24 |
| 6872670 | Silylation treatment unit and method | Tsutae Omori, Masami Yamashita | 2005-03-29 |
| 6869499 | Substrate processing method and substrate processing apparatus | Naoki Shindo, Tadashi Iino | 2005-03-22 |
| 6817368 | Substrate processing method and substrate processing apparatus | Naoki Shindo, Tadashi Iino | 2004-11-16 |
| 6817790 | Substrate processing method and substrate processing apparatus | Takehiko Orii | 2004-11-16 |