Issued Patents All Time
Showing 1–4 of 4 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6821073 | Container handling system for substrate processing apparatus and method of handling containers | — | 2004-11-23 |
| 6612801 | Method and device for arraying substrates and processing apparatus thereof | — | 2003-09-02 |
| 6269552 | Method of drying substrates and drying apparatus | Yoshiyuki Honda, Eiji Masuda | 2001-08-07 |
| 6009890 | Substrate transporting and processing system | Satoshi Kaneko, Yuji Kamikawa, Osamu Kuroda, Shigenori Kitahara, Tatsuya Nishida | 2000-01-04 |