Issued Patents All Time
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 9120120 | Cleaning apparatus and cleaning method, coater/developer and coating and developing method, and computer readable storing medium | Taro Yamamoto, Naoto Yoshitaka, Yoichi Tokunaga | 2015-09-01 |
| 8851092 | Cleaning apparatus and cleaning method, coater/developer and coating and developing method, and computer readable storing medium | Taro Yamamoto, Naoto Yoshitaka, Yoichi Tokunaga | 2014-10-07 |