Issued Patents All Time
Showing 1–14 of 14 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11574827 | Substrate processing apparatus and substrate processing method | Tadashi Iino, Yoshihiro Kai, Nobuhiro Ogata, Jiro Higashijima | 2023-02-07 |
| 11437252 | Substrate processing apparatus and substrate processing method | Hiromitsu Namba, Fitrianto, Yoshifumi Amano | 2022-09-06 |
| 11244820 | Substrate processing apparatus, substrate processing method, and storage medium | — | 2022-02-08 |
| 10851468 | Substrate processing apparatus and substrate processing method | Tadashi Iino, Toru Ihara, Yoshihiro Kai | 2020-12-01 |
| 10707102 | Substrate processing apparatus and substrate processing method | Hiromitsu Namba, Fitrianto, Yoshifumi Amano | 2020-07-07 |
| 9859136 | Substrate processing apparatus and substrate processing method | Hiromitsu Namba, Fitrianto, Yoshifumi Amano | 2018-01-02 |
| 9716002 | Substrate cleaning method | Yasushi Takiguchi, Taro Yamamoto, Akihiro Fujimoto, Shuuichi Nishikido, Dai Kumagai +2 more | 2017-07-25 |
| 9120120 | Cleaning apparatus and cleaning method, coater/developer and coating and developing method, and computer readable storing medium | Taro Yamamoto, Naoto Yoshitaka, Shuichi Nishikido | 2015-09-01 |
| 8851092 | Cleaning apparatus and cleaning method, coater/developer and coating and developing method, and computer readable storing medium | Taro Yamamoto, Naoto Yoshitaka, Shuichi Nishikido | 2014-10-07 |
| 8828183 | Substrate processing apparatus and substrate processing method | Hiromitsu Namba, Yoshifumi Fitrianto, Yoshifumi Amano | 2014-09-09 |
| 8578953 | Substrate cleaning apparatus, substrate cleaning method, and computer-readable storage medium | Yasushi Takiguchi, Taro Yamamoto, Akihiro Fujimoto, Shuuichi Nishikido, Dai Kumagai +2 more | 2013-11-12 |
| RE32132 | Video signal play-back circuit | Hisashi Nakamura, Toshiyuki Akiyama, Akira Shibata | 1986-04-29 |
| 4268873 | Servo circuit for rotary heads of a video tape recorder | Yasunori Kobori, Toshi Itoh, Tunehiko Teshima | 1981-05-19 |
| 4210942 | Video signal play-back circuit | Hisashi Nakamura, Toshiyuki Akiyama, Akira Shibata | 1980-07-01 |