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Fitrianto

TL Tokyo Electron Limited: 1 patents #3,538 of 5,567Top 65%
Overall (All Time): #2,870,372 of 4,157,543Top 70%
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Showing 1–1 of 1 patents

Patent #TitleCo-InventorsDate
9859136 Substrate processing apparatus and substrate processing method Hiromitsu Namba, Yoichi Tokunaga, Yoshifumi Amano 2018-01-02