Issued Patents All Time
Showing 51–75 of 88 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 8186298 | Coating film forming apparatus, use of coating film forming apparatus, and recording medium | Nobuhiro Ogata, Hiroichi Inada, Akihiro Fujimoto | 2012-05-29 |
| 8171405 | Information processing program, information processing method, and information processing device | — | 2012-05-01 |
| 8154106 | Coating and developing system and coating and developing method | Seiki Ishida | 2012-04-10 |
| 8133663 | Pattern forming method and apparatus | Hitoshi Kosugi, Yoshiaki Yamada, Yasuhito Saiga | 2012-03-13 |
| 8111372 | Coating film forming apparatus and coating film forming method for immersion light exposure | Hideharu Kyouda, Junichi Kitano | 2012-02-07 |
| 8069816 | Coating film processing method and apparatus | Kousuke Yoshihara | 2011-12-06 |
| 8037890 | Substrate cleaning device and substrate cleaning method | Hideharu Kyouda, Tetsu Kawasaki, Satoru Shimura | 2011-10-18 |
| 8029624 | Rinse method and developing apparatus | Kousuke Yoshihara, Junji Nakamura, Hirofumi Takeguchi | 2011-10-04 |
| 8026048 | Developing apparatus and developing method | Atsushi Ookouchi, Hirofumi Takeguchi, Hideharu Kyouda, Kousuke Yoshihara | 2011-09-27 |
| 8001983 | Cleaning apparatus, coating and developing apparatus, and cleaning method | Masahiro Fukuda | 2011-08-23 |
| 7959988 | Coating film forming apparatus and method | Yasushi Takiguchi, Akihiro Fujimoto, Hideharu Kyouda, Junichi Kitano, Osamu Miyahara +1 more | 2011-06-14 |
| 7924402 | Exposure apparatus and device manufacturing method | Hiroyuki Nagasaka, Osamu Hirakawa | 2011-04-12 |
| 7918182 | Developing device and developing method | Kousuke Yoshihara, Hideharu Kyouda, Hirofumi Takeguchi, Atsushi Ookouchi | 2011-04-05 |
| 7896562 | Developing method, developing apparatus and storage medium | Hirofumi Takeguchi, Atsushi Ookouchi, Kousuke Yoshihara | 2011-03-01 |
| 7896254 | Temperature regulation method and system for low flow rate liquid | Hiroyasu Goto, Masahiro Fukuda | 2011-03-01 |
| 7826032 | Circulation system for high refractive index liquid in pattern forming apparatus | Hitoshi Kosugi, Yoshiaki Yamada, Yasuhito Saiga | 2010-11-02 |
| 7823534 | Development device and development method | Atsushi Ookouchi, Hirofumi Takeguchi, Hideharu Kyouda, Kousuke Yoshihara | 2010-11-02 |
| 7809460 | Coating and developing apparatus, coating and developing method and storage medium in which a computer-readable program is stored | Seiki Ishida | 2010-10-05 |
| 7806076 | Developing apparatus and method | Atsushi Ookouchi, Hirofumi Takeguchi, Kousuke Yoshihara | 2010-10-05 |
| 7742146 | Coating and developing method, coating and developing system and storage medium | Hideharu Kyouda, Kousuke Yoshihara | 2010-06-22 |
| 7733472 | Method and system for determining condition of process performed for coating film before immersion light exposure | Hitoshi Kosugi | 2010-06-08 |
| 7714979 | Substrate processing apparatus | Hideo Funakoshi, Yuichiro Inatomi | 2010-05-11 |
| 7712475 | Cleaning apparatus, coating and developing apparatus, and cleaning method | Masahiro Fukuda | 2010-05-11 |
| 7697110 | Exposure apparatus and device manufacturing method | Hiroyuki Nagasaka, Osamu Hirakawa | 2010-04-13 |
| 7665916 | Coater/developer and coating/developing method | Hideharu Kyouda | 2010-02-23 |