Issued Patents All Time
Showing 26–40 of 40 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 8695145 | Cleaning method, cleaning apparatus | Yasuhito Yoshimizu, Hiroshi Tomita | 2014-04-15 |
| 8435903 | Semiconductor substrate surface treatment method | Yoshihiro Ogawa, Shinsuke Kimura, Tatsuhiko Koide, Hiroshi Tomita | 2013-05-07 |
| 8375964 | Template cleaning method, system, and apparatus | Hiroshi Tomita, Minako Inukai | 2013-02-19 |
| 8372212 | Supercritical drying method and apparatus for semiconductor substrates | Yohei Sato, Hiroshi Tomita, Hidekazu Hayashi, Yukiko Kitajima, Takayuki Toshima +5 more | 2013-02-12 |
| 8148175 | Manufacturing apparatus for semiconductor device and manufacturing method for semiconductor device | — | 2012-04-03 |
| 8097538 | Method of manufacturing semiconductor device | Tatsuhiko Koide, Hidekazu Hayashi, Hiroshi Tomita | 2012-01-17 |
| 7985683 | Method of treating a semiconductor substrate | Hiroshi Tomita, Tatsuhiko Koide, Kentaro Shimayama, Hiroyasu Iimori, Linan Ji | 2011-07-26 |
| 7838425 | Method of treating surface of semiconductor substrate | Hiroshi Tomita, Hiroyasu Iimori, Tatsuhiko Koide, Linan Ji | 2010-11-23 |
| 7776756 | Etching apparatus, a method of controlling an etching solution, and a method of manufacturing a semiconductor device | Hiroyasu Iimori, Mami Saito, Yoshihiro Ogawa, Hiroshi Tomita, Soichi Nadahara | 2010-08-17 |
| 7749909 | Method of treating a semiconductor substrate | Hiroshi Tomita, Tatsuhiko Koide, Kentaro Shimayama, Hiroyasu Iimori, Linan Ji | 2010-07-06 |
| 7635397 | Manufacturing apparatus for semiconductor device and manufacturing method for semiconductor device | — | 2009-12-22 |
| 7267742 | Etching apparatus, a method of controlling an etching solution, and a method of manufacturing a semiconductor device | Hiroyasu Iimori, Mami Saito, Yoshihiro Ogawa, Hiroshi Tomita, Soichi Nadahara | 2007-09-11 |
| 7097784 | Etching method and apparatus for semiconductor wafers | Yoshihiro Ogawa, Hiroshi Tomita, Hiroyasu Iimori | 2006-08-29 |
| 6492271 | Semiconductor device and method of manufacturing the same | Yoshihiro Uozumi, Soichi Nadahara, Yoshihiro Ogawa, Hiroshi Tomita | 2002-12-10 |
| 6286524 | Wafer drying apparatus and method with residual particle removability enhancement | Hiroshi Tomita, Soichi Nadahara, Katsuya Okumura | 2001-09-11 |