Issued Patents All Time
Showing 26–50 of 50 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 7896973 | Substrate processing apparatus and substrate processing method | Tadashi Iino | 2011-03-01 |
| 7836900 | Substrate processing system, substrate processing method, recording medium and software | Takayuki Toshima, Hiroshi Yano, Kotaro Tsurusaki | 2010-11-23 |
| 7581335 | Substrate drying processing apparatus, method, and program recording medium | Hiroshi Tanaka, Hidetoshi Nakao, Atushi Yamashita, Tsukasa Hirayama, Kotaro Tsurusaki | 2009-09-01 |
| 7410543 | Substrate processing method | Takayuki Toshima, Tadashi Iino | 2008-08-12 |
| 6949231 | PCB decomposition reactor | Yasuhiro Yamauchi, Kan Ogata, Takashi Moribe, Masakazu Tateishi, Tadatsugu Fukuzumi +3 more | 2005-09-27 |
| 6869499 | Substrate processing method and substrate processing apparatus | Takayuki Toshima, Tadashi Iino | 2005-03-22 |
| 6817368 | Substrate processing method and substrate processing apparatus | Takayuki Toshima, Tadashi Iino | 2004-11-16 |
| 6729041 | Substrate processing apparatus and substrate processing method | Tadashi Iino | 2004-05-04 |
| 6599485 | Apparatus for decomposing PCB | Yasuhiro Yamauchi, Kan Ogata, Nobuhiro Hokao, Yoshihiko Tsuchiyama, Masakazu Tateishi +1 more | 2003-07-29 |
| 6592678 | Cleaning method and cleaning equipment | Yuji Kamikawa, Shigenori Kitahara, Miyako Yamasaka | 2003-07-15 |
| 6322761 | PCB decomposition reactor | Yasuhiro Yamauchi, Kan Ogata, Takashi Moribe, Masakazu Tateishi, Tadatsugu Fukuzumi +3 more | 2001-11-27 |
| 6318386 | Treatment apparatus | Yuji Kamikawa, Shigenori Kitahara | 2001-11-20 |
| 6293288 | Cleaning method and apparatus | Shigenori Kitahara, Hironobu Hyakutake | 2001-09-25 |
| 6235963 | Method for decomposing PCB | Yasuhiro Yamauchi, Kan Ogata, Nobuhiro Hokao, Yoshihiko Tsuchiyama, Masakazu Tateishi +1 more | 2001-05-22 |
| 6203627 | Cleaning method | Shigenori Kitahara, Hironobu Hyakutake | 2001-03-20 |
| 6158447 | Cleaning method and cleaning equipment | Yuji Kamikawa, Shigenori Kitahara, Miyako Yamasaka | 2000-12-12 |
| 6109278 | Liquid treatment method and apparatus | Miyako Yamasaka, Yuji Kamikawa | 2000-08-29 |
| 6082381 | Treatment apparatus | Yuji Kamikawa, Shigenori Kitahara | 2000-07-04 |
| 6001191 | Substrate washing method, substrate washing-drying method, substrate washing apparatus and substrate washing-drying apparatus | Yuuji Kamikawa, Kinya Ueno, Yoshio Kumagai | 1999-12-14 |
| 5922138 | Liquid treatment method and apparatus | Miyako Yamasaka, Yuji Kamikawa | 1999-07-13 |
| 5862823 | Substrate cleaning method and a substrate cleaning apparatus | Yuji Kamikawa | 1999-01-26 |
| 5845660 | Substrate washing and drying apparatus, substrate washing method, and substrate washing apparatus | Yuuji Kamikawa, Shori Mokuo, Yoshio Kumagai | 1998-12-08 |
| 5823008 | Cold air supply unit | Isao Nikai, Motohisa Uda, Takeshi Fuse | 1998-10-20 |
| 5817185 | Method for washing substrates | Shigenori Kitahara, Takayuki Toshima, Kenji Yokomizo | 1998-10-06 |
| 5730162 | Apparatus and method for washing substrates | Shigenori Kitahara, Takayuki Toshima, Kenji Yokomizo | 1998-03-24 |