SU

Shouta Umezaki

TL Tokyo Electron Limited: 1 patents #3,538 of 5,567Top 65%
Overall (All Time): #2,978,931 of 4,157,543Top 75%
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Showing 1–1 of 1 patents

Patent #TitleCo-InventorsDate
9842751 Substrate liquid processing apparatus Yoshihiro Kai, Kazuki Kosai, Mitsuo Tanaka 2017-12-12