Issued Patents All Time
Showing 26–38 of 38 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 5533736 | Thermal processing apparatus | — | 1996-07-09 |
| 5484484 | Thermal processing method and apparatus therefor | Yuichi Mikata, Akihito Yamamoto | 1996-01-16 |
| D361752 | Wafer boat or rack for holding semiconductor wafers | — | 1995-08-29 |
| 5362229 | Piping connection device | — | 1994-11-08 |
| 5261935 | Clean air apparatus | Katsumi Ishii, Takanobu Asano, Masaharu Abe, Kazunari Sakata, Takashi Tanahashi +1 more | 1993-11-16 |
| 5221201 | Vertical heat treatment apparatus | Katsutoshi Ishii, Naotaka Ogino | 1993-06-22 |
| 5219464 | Clean air apparatus | Kazunari Sakata, Katsumi Ishii, Takashi Tanahashi, Syuji Moriya | 1993-06-15 |
| 5181819 | Apparatus for processing semiconductors | Kazunari Sakata, Katsumi Ishii | 1993-01-26 |
| 5131799 | Semiconductor wafer transferring apparatus and boat for thermal treatment of a semiconductor wafer | Hironobu Nishi, Takanobu Asano | 1992-07-21 |
| 5088922 | Heat-treatment apparatus having exhaust system | Jyunichi Kakizaki | 1992-02-18 |
| 5030057 | Semiconductor wafer transferring method and apparatus and boat for thermal treatment of a semiconductor wafer | Hironobu Nishi, Takanobu Asano, Kazutoshi Sawado, Masashi FUMOTO, Shozo Ito +1 more | 1991-07-09 |
| 5007788 | Pitch changing device for changing pitches of plate-like objects and method of changing pitches | Takanobu Asano, Wataru Ohkase | 1991-04-16 |
| 4954079 | Heat-treating apparatus and a method for the same | — | 1990-09-04 |