YS

Yukihiko Sakata

TL Tokyo Electron Limited: 1 patents #3,538 of 5,567Top 65%
📍 Tosu, JP: #121 of 191 inventorsTop 65%
Overall (All Time): #3,445,089 of 4,157,543Top 85%
1
Patents All Time

Issued Patents All Time

Showing 1–1 of 1 patents

Patent #TitleCo-InventorsDate
6874515 Substrate dual-side processing apparatus Akira Ishihara, Michiaki Matsushita 2005-04-05