Issued Patents All Time
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11791182 | Measuring method and measuring device | Yuji Mimura, Shigeto Tsuruta, Hisanori Hizume | 2023-10-17 |
| 9343349 | Substrate holding apparatus and substrate holding method | Yasuharu Iwashita, Osamu Hirakawa, Takeshi Tamura, Akira Fukutomi | 2016-05-17 |