HK

Hiroshi KOMEDA

TL Tokyo Electron Limited: 1 patents #3,538 of 5,567Top 65%
Overall (All Time): #2,938,613 of 4,157,543Top 75%
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Showing 1–1 of 1 patents

Patent #TitleCo-InventorsDate
9613797 Cleaning device, peeling system, cleaning method and computer-readable storage medium Osamu Hirakawa, Takashi Sakaue, Katsuhiro Iino 2017-04-04