Issued Patents All Time
Showing 51–75 of 102 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6268013 | Coating a resist film, with pretesting for particle contamination | Kazutoshi Yoshioka, Kazuo Sakamoto, Norio Semba | 2001-07-31 |
| 6267516 | Developing apparatus and developing nozzle | Shuichi Nagamine, Akira Nishiya, Hitoshi Kosugi | 2001-07-31 |
| 6264705 | Processing system | Issei Ueda | 2001-07-24 |
| 6197372 | Coating and developing apparatus, complex apparatus and processing method in coating and developing apparatus | Issei Ueda | 2001-03-06 |
| 6190063 | Developing method and apparatus | — | 2001-02-20 |
| 6147329 | Resist processing system and resist processing method | Kouji Okamura | 2000-11-14 |
| 6126338 | Resist coating-developing system | — | 2000-10-03 |
| 6126703 | Substrate processing apparatus having an interface section including two stacked substrate waiting table | Issei Ueda | 2000-10-03 |
| 6097005 | Substrate processing apparatus and substrate processing method | — | 2000-08-01 |
| 6074154 | Substrate treatment system, substrate transfer system, and substrate transfer method | Issei Ueda, Kazuhiko Ito, Mitiaki Matsushita, Masatoshi Kaneda, Yuji Matsuyama | 2000-06-13 |
| 6027262 | Resist process method and system | — | 2000-02-22 |
| 6024502 | Method and apparatus for processing substrate | Yoichi Deguchi | 2000-02-15 |
| 6004047 | Method of and apparatus for processing photoresist, method of evaluating photoresist film, and processing apparatus using the evaluation method | Kosuke Yoshihara, Yuji Fukuda | 1999-12-21 |
| 5980591 | System for processing a plurality of objects contained in a plurality of cassettes | Shizuo Ogawa, Toshihiko Nagano | 1999-11-09 |
| 5974682 | Cooling process system | — | 1999-11-02 |
| 5975097 | Processing apparatus for target processing substrate | Akira Yonemizu, Hiroyuki Kudou | 1999-11-02 |
| 5972110 | Resist processing system | — | 1999-10-26 |
| 5944894 | Substrate treatment system | Junichi Kitano, Takayuki Katano, Keiko Kanzawa, Norio Semba | 1999-08-31 |
| 5942013 | Substrate processing system | — | 1999-08-24 |
| 5938847 | Method and apparatus for coating a film on an object being processed | Kazutoshi Yoshioka, Kazuo Sakamoto, Norio Semba | 1999-08-17 |
| 5937223 | Processing apparatus | Yoichi Deguchi | 1999-08-10 |
| 5928390 | Vertical processing apparatus | Hidetami Yaegashi, Takayuki Toshima, Eiji Yamaguchi, Junichi Kitano, Takayuki Katano +2 more | 1999-07-27 |
| 5923915 | Method and apparatus for processing resist | Yoichi Deguchi | 1999-07-13 |
| 5868865 | Apparatus and method for washing treatment | — | 1999-02-09 |
| 5858112 | Method for cleaning substrates | Akira Yonemizu | 1999-01-12 |