Issued Patents All Time
Showing 26–50 of 102 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 7241061 | Coating and developing system and coating and developing method | Shinichi Hayashi, Yasushi Hayashida, Nobuaki Matsuoka, Yoshio Kimura, Issei Ueda +1 more | 2007-07-10 |
| 7087118 | Coating film forming apparatus and coating unit | Takahiro Kitano, Masateru Morikawa, Yukihiko Esaki, Nobukazu Ishizaka, Norihisa Koga +2 more | 2006-08-08 |
| 7011863 | Substrate processing apparatus and substrate processing method | — | 2006-03-14 |
| 6936107 | Coating film forming apparatus and coating unit | Takahiro Kitano, Masateru Morikawa, Yukihiko Esaki, Nobukazu Ishizaka, Norihisa Koga +2 more | 2005-08-30 |
| 6872256 | Film forming unit | Takahiro Kitano, Masateru Morikawa, Yukihiko Esaki, Nobukazu Ishizaka, Norihisa Koga +2 more | 2005-03-29 |
| 6716478 | Coating film forming apparatus and coating film forming method | Takahiro Kitano, Masateru Morikawa, Yukihiko Esaki, Nobukazu Ishizaka, Norihisa Koga +2 more | 2004-04-06 |
| 6676757 | Coating film forming apparatus and coating unit | Takahiro Kitano, Masateru Morikawa, Yukihiko Esaki, Nobukazu Ishizaka, Norihisa Koga +2 more | 2004-01-13 |
| 6670287 | Coating method and coating apparatus | Yoichi Deguchi | 2003-12-30 |
| 6655891 | Substrate treatment system, substrate transfer system, and substrate transfer method | Issei Ueda, Kazuhiko Ito, Mitiaki Matsushita, Masatoshi Kaneda, Yuji Matsuyama | 2003-12-02 |
| 6627263 | Film forming apparatus and film forming method | Takahiro Kitano, Masateru Morikawa, Kazuhiro Takeshita | 2003-09-30 |
| 6616760 | Film forming unit | Takahiro Kitano, Masateru Morikawa, Yukihiko Esaki, Nobukazu Ishizaka, Norihisa Koga +2 more | 2003-09-09 |
| 6605153 | Coating film forming apparatus | Takahiro Kitano, Masateru Morikawa, Yukihiko Esaki, Nobukazu Ishizaka, Norihisa Koga +2 more | 2003-08-12 |
| 6536964 | Substrate processing system and substrate processing method | Takahiro Kitano, Takafumi Toshimitsu | 2003-03-25 |
| 6515731 | Substrate processing apparatus and substrate processing method | — | 2003-02-04 |
| 6514344 | Film forming unit | Takahiro Kitano, Masateru Morikawa, Yukihiko Esaki, Nobukazu Ishizaka, Norihisa Koga +2 more | 2003-02-04 |
| 6475279 | Substrate processing apparatus and substrate processing method | — | 2002-11-05 |
| 6464789 | Substrate processing apparatus | — | 2002-10-15 |
| 6432842 | Coating method and coating apparatus | Yoichi Deguchi | 2002-08-13 |
| 6425722 | Substrate treatment system, substrate transfer system, and substrate transfer method | Issei Ueda, Kazuhiko Ito, Mitiaki Matsushita, Masatoshi Kaneda, Yuji Matsuyama | 2002-07-30 |
| 6416583 | Film forming apparatus and film forming method | Takahiro Kitano, Masateru Morikawa, Kazuhiro Takeshita | 2002-07-09 |
| 6383948 | Coating film forming apparatus and coating film forming method | Takahiro Kitano, Masateru Morikawa, Yukihiko Esaki, Nobukazu Ishizaka, Norihisa Koga +2 more | 2002-05-07 |
| 6371667 | Film forming method and film forming apparatus | Takahiro Kitano, Tomohide Minami, Masateru Morikawa | 2002-04-16 |
| 6368776 | Treatment apparatus and treatment method | Koji Harada, Junichi Nagata, Yasunori Kawakami, Masatoshi Kaneda, Norio Semba +3 more | 2002-04-09 |
| 6332724 | Substrate processing apparatus | Mitsuteru Yano, Norio Semba, Kouzou Kanagawa, Issei Ueda, Kazuhiko Ohi | 2001-12-25 |
| 6333003 | Treatment apparatus, treatment method, and impurity removing apparatus | Takayuki Katano, Junichi Kitano, Norio Semba | 2001-12-25 |