Issued Patents All Time
Showing 101–102 of 102 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 5002008 | Coating apparatus and method for applying a liquid to a semiconductor wafer, including selecting a nozzle in a stand-by state | Mitsuru Ushijima, Osamu Hirakawa, Yoshio Kimura, Noriyuki Anai | 1991-03-26 |
| 4985722 | Apparatus for coating a photo-resist film and/or developing it after being exposed | Mitsuru Ushijima | 1991-01-15 |