Issued Patents All Time
Showing 1–4 of 4 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10112210 | Coating processing apparatus for coating liquid on substrate moving in a horizontal direction with slit-shaped ejecting port moving in a vertical direction | — | 2018-10-30 |
| 9623435 | Substrate processing apparatus for coating liquid composed of first coating liquid and second coating liquid on substrate with slit-shaped ejection port | — | 2017-04-18 |
| 8192796 | Substrate processing apparatus and substrate processing method | Hiroshi Shinya, Shouichi Terada, Tsuyoshi Mizuno | 2012-06-05 |
| 7757626 | Substrate processing apparatus and substrate processing method | Hiroshi Shinya, Shouichi Terada, Tsuyoshi Mizuno | 2010-07-20 |