Issued Patents All Time
Showing 1–4 of 4 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10472719 | Nozzle and substrate processing apparatus using same | Yu Wamura, Masahiko Kaminishi, Kosuke Takahashi, Hiroko Sasaki, Yu Sasaki | 2019-11-12 |
| 10053776 | Method of detoxifying exhaust pipe and film forming apparatus | Yu Wamura, Masahiko Kaminishi, Kosuke Takahashi, Yu Sasaki, Hiroko Sasaki | 2018-08-21 |
| 9929008 | Substrate processing method and substrate processing apparatus | Yu Wamura, Masahiko Kaminishi, Yu Sasaki, Kosuke Takahashi | 2018-03-27 |
| 8815112 | Liquid processing method, recording medium having recorded program for executing liquid processing method therein and liquid processing apparatus | Tsuyoshi Mizuno, Hiromitsu Namba, Yuichiro Morozumi, Shingo Hishiya, Katsushige Harada | 2014-08-26 |