Issued Patents All Time
Showing 26–39 of 39 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 8905051 | Liquid processing apparatus and liquid processing method | — | 2014-12-09 |
| 8887741 | Liquid processing apparatus, liquid processing method and storage medium | Yoshifumi Amano | 2014-11-18 |
| 8741099 | Liquid processing apparatus | — | 2014-06-03 |
| 8696863 | Liquid processing apparatus and liquid processing method | Hiromitsu Namba | 2014-04-15 |
| 8607807 | Liquid treatment apparatus and method | Norihiro Itoh | 2013-12-17 |
| 8590547 | Liquid processing apparatus | Hiromitsu Namba | 2013-11-26 |
| 8567339 | Liquid processing apparatus | Hiromitsu Namba | 2013-10-29 |
| 8409482 | Porous member | Satoshi Kaneko | 2013-04-02 |
| 8398817 | Chemical-liquid processing apparatus and chemical-liquid processing method | Hiromitsu Namba | 2013-03-19 |
| 8313536 | Functional member having surface cleanliness | Satoshi Kaneko | 2012-11-20 |
| 8298344 | Method of processing workpieces using a vessel with a low pressure space surrounding a processing space for the purpose of preventing the leakage of atmosphere into the processing space | — | 2012-10-30 |
| 8268087 | Liquid processing apparatus, liquid processing method, and storage medium | Yuji Kamikawa, Norihiro Ito | 2012-09-18 |
| 8246759 | Substrate processing apparatus, substrate processing method, and program storage medium | Norihiro Itoh | 2012-08-21 |
| 8002894 | Processing apparatus and processing method | Naoyuki Okamura, Kousuke Maeda | 2011-08-23 |