Issued Patents All Time
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 8133327 | Substrate processing method, storage medium and substrate processing apparatus | Hiroshi Nagayasu | 2012-03-13 |
| 7767006 | Ozone processing apparatus and ozone processing method | Norihiro Ito, Takehiko Orii, Mitsunori Nakamori, Tadashi Iino, Hiroki Ohno +1 more | 2010-08-03 |