Issued Patents All Time
Showing 26–39 of 39 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6358329 | Resist residue removal apparatus and method | Seiji Muranaka | 2002-03-19 |
| 6199567 | Method and apparatus for manufacturing semiconductor device | Tetsuo Aoyama, Mayumi Hada | 2001-03-13 |
| 6092537 | Post-treatment method for dry etching | — | 2000-07-25 |
| 6048409 | Washing apparatus and washing method | Toshiaki Ohmori, Hiroshi Tanaka, Nobuaki Doi | 2000-04-11 |
| 5934566 | Washing apparatus and washing method | Toshiaki Ohmori, Hiroshi Tanaka, Nobuaki Doi | 1999-08-10 |
| 5918817 | Two-fluid cleaning jet nozzle and cleaning apparatus, and method utilizing the same | Masuo Tada, Mitsuhiro Ogawa | 1999-07-06 |
| 5873380 | Wafer cleaning apparatus | — | 1999-02-23 |
| 5746233 | Washing apparatus and method therefor | Takeshi Kuroda | 1998-05-05 |
| 5357718 | Wafer rinsing apparatus | — | 1994-10-25 |
| 5283989 | Apparatus for polishing an article with frozen particles | Akiko Hisasue, Takaaki Fukumoto | 1994-02-08 |
| 5216890 | Device for and method of producing hyperfine frozen particles | Cozy Ban, Takaaki Fukumoto | 1993-06-08 |
| 5147466 | Method of cleaning a surface by blasting the fine frozen particles against the surface | Toshiaki Ohmori, Takaaki Fukumoto | 1992-09-15 |
| 5129198 | Cleaning device for semiconductor wafers | Nobuyoshi Hattori, Takaaki Fukumoto, Masuo Tada | 1992-07-14 |
| 5074083 | Cleaning device using fine frozen particles | Takaaki Fukumoto, Toshiaki Ohmori | 1991-12-24 |