Issued Patents All Time
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11865590 | Substrate cleaning method, processing container cleaning method, and substrate processing device | Kyoko Ikeda, Kazuya Dobashi, Tsunenaga Nakashima, Kenji Sekiguchi, Shuuichi Nishikido +1 more | 2024-01-09 |
| 11504751 | Substrate cleaning method, processing container cleaning method, and substrate processing device | Kyoko Ikeda, Kazuya Dobashi, Tsunenaga Nakashima, Kenji Sekiguchi, Shuuichi Nishikido +1 more | 2022-11-22 |