Issued Patents All Time
Showing 1–7 of 7 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 8945412 | Substrate cleaning apparatus, substrate cleaning method, and substrate processing apparatus | Teruyuki Hayashi | 2015-02-03 |
| 8647440 | Substrate processing method and substrate processing apparatus | Teruyuki Hayashi | 2014-02-11 |
| 7923680 | Analysis method and analysis apparatus | Kazuya Dobashi, Kohei Tsugita, Teruyuki Hayashi | 2011-04-12 |
| 6800546 | Film forming method by radiating a plasma on a surface of a low dielectric constant film | Nobuo Konishi, Mitsuaki Iwashita, Hiroki Ohno, Masahito Sugiura | 2004-10-05 |
| 6528108 | Method and apparatus for observing porous amorphous film, and method and apparatus for forming the same | — | 2003-03-04 |
| 6407404 | Apparatus for the examining defect of monolithic substrate and method for examining the same | Yoshio Yokoyama | 2002-06-18 |
| 4481483 | Low distortion amplifier circuit | — | 1984-11-06 |