TA

Tetsutoshi Awamura

TL Tokyo Electron Limited: 1 patents #3,538 of 5,567Top 65%
Overall (All Time): #3,358,700 of 4,157,543Top 85%
1
Patents All Time

Issued Patents All Time

Showing 1–1 of 1 patents

Patent #TitleCo-InventorsDate
7387455 Substrate processing device, substrate processing method, and developing device Yukio Kiba, Keiichi Tanaka, Takahiro Okubo, Shuuichi Nishikido 2008-06-17