Issued Patents All Time
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6841483 | Unique process chemistry for etching organic low-k materials | Helen Zhu, James R. Bowers, Ian J. Morey, Michael Goss | 2005-01-11 |
| 5431772 | Selective silicon nitride plasma etching process | Kenneth L. DeVries, Bang Nguyen, Chau-Hwa J. Yang | 1995-07-11 |
| 5188704 | Selective silicon nitride plasma etching | Kenneth L. DeVries, Bang Nguyen, Chau-Hwa J. Yang | 1993-02-23 |