Issued Patents All Time
Showing 1–3 of 3 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6696366 | Technique for etching a low capacitance dielectric layer | Ian J. Morey, Susan Ellingboe, Janet M. Flanner, John Lang | 2004-02-24 |
| 6653734 | Convertible hot edge ring to improve low-K dielectric etch | Janet M. Flanner, Susan Ellingboe, John Lang, Ian J. Morey | 2003-11-25 |
| 6383931 | Convertible hot edge ring to improve low-K dielectric etch | Janet M. Flanner, Susan Ellingboe, John Lang, Ian J. Morey | 2002-05-07 |