Issued Patents All Time
Showing 1–3 of 3 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6241845 | Apparatus for reducing process drift in inductive coupled plasma etching such as oxide layer | Janet M. Flanner, John P. Jordan, Adrian Doe, Robert Chebi | 2001-06-05 |
| 6048798 | Apparatus for reducing process drift in inductive coupled plasma etching such as oxide layer | Janet M. Flanner, John P. Jordon, Adrian Doe, Robert Chebi | 2000-04-11 |
| 5783496 | Methods and apparatus for etching self-aligned contacts | Janet M. Flanner, Linda Marquez, Adrian Doe, Joel M. Cook | 1998-07-21 |