PG

Prashant Gadgil

Lam Research: 3 patents #812 of 2,128Top 40%
Overall (All Time): #1,622,983 of 4,157,543Top 40%
3
Patents All Time

Issued Patents All Time

Patent #TitleCo-InventorsDate
6241845 Apparatus for reducing process drift in inductive coupled plasma etching such as oxide layer Janet M. Flanner, John P. Jordan, Adrian Doe, Robert Chebi 2001-06-05
6048798 Apparatus for reducing process drift in inductive coupled plasma etching such as oxide layer Janet M. Flanner, John P. Jordon, Adrian Doe, Robert Chebi 2000-04-11
5783496 Methods and apparatus for etching self-aligned contacts Janet M. Flanner, Linda Marquez, Adrian Doe, Joel M. Cook 1998-07-21