Issued Patents All Time
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6048798 | Apparatus for reducing process drift in inductive coupled plasma etching such as oxide layer | Prashant Gadgil, Janet M. Flanner, Adrian Doe, Robert Chebi | 2000-04-11 |
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6048798 | Apparatus for reducing process drift in inductive coupled plasma etching such as oxide layer | Prashant Gadgil, Janet M. Flanner, Adrian Doe, Robert Chebi | 2000-04-11 |